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Plasma potential of a moving ionization zone in DC magnetron sputtering: Journal of Applied Physics: Vol 121, No 6
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PDF) Monte Carlo simulation of the transport of atoms in DC magnetron sputtering | Diederik Depla - Academia.edu
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A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases - ScienceDirect
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Tutorial: Hysteresis during the reactive magnetron sputtering process: Journal of Applied Physics: Vol 124, No 24
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